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Resistivity vs thickness for c-axis single crystal Ru films deposited... | Download Scientific Diagram
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Dependence of Ru film thickness and resistivity on the amount of ALD... | Download Scientific Diagram
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Current-voltage(I-V) for Ru Films of different thickness on the glass... | Download Scientific Diagram
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XRD patterns of the Ru films on TaN (5 nm)/Si with different growth... | Download Scientific Diagram
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BALD Engineering - Born in Finland, Born to ALD: Low temperature ALD of Rutheium using H2O as co-reactant
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PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513
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a,b). The dependence of Ru film thickness on the number of ALD cycles... | Download Scientific Diagram
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SEM measured Ru film thickness vs deposition process cycle number at... | Download Scientific Diagram
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Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules - ScienceDirect
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Color online Sheet resistance and Ru layer density of Ru thin film on... | Download Scientific Diagram
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